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A novel photo-acid generator bound molecular glass resist with a single protecting group
Kasai, Tatsuaki, Higashihara, Tomoya, Ueda, MitsuruVolume:
51
Language:
english
Journal:
Journal of Polymer Science Part A: Polymer Chemistry
DOI:
10.1002/pola.26575
Date:
May, 2013
File:
PDF, 2.54 MB
english, 2013