Gas-phase modification of polymer coatings: the use of gas-phase silylation for image-tone reversal of chemically amplified photoresists based on electrophilic addition reactions
Lee, S. Ming, Matuszczak, Stephen, Frechet, Jean M. J., Lee, Chester, Shacham-Diamand, YosefVolume:
6
Language:
english
Journal:
Chemistry of Materials
DOI:
10.1021/cm00046a037
Date:
October, 1994
File:
PDF, 1.82 MB
english, 1994