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[IEEE 2006 7th International Conference on Electronic Packaging Technology - Shanghai, China (2006.08.26-2006.08.29)] 2006 7th International Conference on Electronic Packaging Technology - Comparison Study from Sputtering, Sol-Gel, and ALD Processes Developing Embedded Thin Film Capacitors
Ahn, Jinyong, Lee, Joseph Y., Kim, Joonsung, Yoo, JeGwang, Ryu, ChangsupYear:
2006
Language:
english
DOI:
10.1109/icept.2006.359875
File:
PDF, 5.30 MB
english, 2006