Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
2014 / 11 Vol. 32; Iss. 6
Transfer patterning of large-area graphene nanomesh via holographic lithography and plasma etching
Ding, Junjun, Du, Ke, Wathuthanthri, Ishan, Choi, Chang-Hwan, Fisher, Frank T., Yang, Eui-HyeokVolume:
32
Language:
english
Journal:
Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena
DOI:
10.1116/1.4895667
Date:
November, 2014
File:
PDF, 2.17 MB
english, 2014