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Transfer patterning of large-area graphene nanomesh via...

Transfer patterning of large-area graphene nanomesh via holographic lithography and plasma etching

Ding, Junjun, Du, Ke, Wathuthanthri, Ishan, Choi, Chang-Hwan, Fisher, Frank T., Yang, Eui-Hyeok
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Volume:
32
Language:
english
Journal:
Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena
DOI:
10.1116/1.4895667
Date:
November, 2014
File:
PDF, 2.17 MB
english, 2014
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