Holmium and titanium oxide nanolaminates by atomic layer deposition
Kukli, Kaupo, Lu, Jun, Link, Joosep, Kemell, Marianna, Puukilainen, Esa, Heikkilä, Mikko, Hoxha, Roland, Tamm, Aile, Hultman, Lars, Stern, Raivo, Ritala, Mikko, Leskelä, MarkkuVolume:
565
Language:
english
Journal:
Thin Solid Films
DOI:
10.1016/j.tsf.2014.06.039
Date:
August, 2014
File:
PDF, 1.81 MB
english, 2014