Investigation of the effect of oxygen gas on properties of GAZO thin films fabricated by facing targets sputtering system
Hong, Jeong Soo, Matsushita, Nobuhiro, Kim, Kyung HwanVolume:
29
Language:
english
Journal:
Semiconductor Science and Technology
DOI:
10.1088/0268-1242/29/7/075007
Date:
July, 2014
File:
PDF, 1013 KB
english, 2014