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Nonfluorinated Volatile Copper(I) 1,3-Diketiminates as Precursors for Cu Metal Deposition via Atomic Layer Deposition
Park, Kyung-Ho, Bradley, Alexander Z., Thompson, Jeffery S., Marshall, Will J.Volume:
45
Language:
english
Journal:
Inorganic Chemistry
DOI:
10.1021/ic061016e
Date:
October, 2006
File:
PDF, 85 KB
english, 2006