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[IEEE 2012 IEEE Photonics Society International Conference on Optical MEMS and Nanophotonics - Banff, AB, Canada (2012.08.6-2012.08.9)] 2012 International Conference on Optical MEMS and Nanophotonics - Tip-tilt-pistion micromirror based on symmetrical lateral-shift-free piezoelectric actuators
Liao, Wenjun, Zhu, Yiping, Liu, Wenjing, Liu, Lin, Tang, Yongming, Wang, Baoping, Xie, HuikaiYear:
2012
Language:
english
DOI:
10.1109/omems.2012.6318852
File:
PDF, 920 KB
english, 2012