Oxidation Properties of Hydrogen-Terminated Si(001) Surfaces Following Use of a Hyperthermal Broad Atomic Oxygen Beam at Low Temperatures
Tagawa, Masahito, Yokota, Kumiko, Ohmae, Nobuo, Kinoshita, Hiroshi, Umeno, MasatakaVolume:
40
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/jjap.40.6152
Date:
October, 2001
File:
PDF, 77 KB
english, 2001