![](/img/cover-not-exists.png)
Fundamental properties of intrinsic gettering of iron in a silicon wafer
Aoki, Masaki, Hara, Akito, Ohsawa, AkiraVolume:
72
Year:
1992
Language:
english
DOI:
10.1063/1.351764
File:
PDF, 651 KB
english, 1992