Potential structures in asymmetrical radio frequency...

Physics Letters A 1994 Vol. 193; Iss. 1

Potential structures in asymmetrical radio frequency discharges containing negative ions

Yoshihiro Okuno, Yasunori Ohtsu, Hiroharu Fujita
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Volume:
193
Year:
1994
Language:
english
Pages:
3
DOI:
10.1016/0375-9601(94)00607-5
File:
PDF, 230 KB
english, 1994
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