Synthesis of VO2 Thin Films by Atomic Layer Deposition with...

ECS Transactions 2013 / 03 Vol. 50; Iss. 13

Synthesis of VO2 Thin Films by Atomic Layer Deposition with TEMAV as Precursor

Zhang, K., Tangirala, M., Nminibapiel, D., Cao, W., Pallem, V., Dussarrat, C., Baumgart, H.
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
50
Language:
english
Journal:
ECS Transactions
DOI:
10.1149/05013.0175ecst
Date:
March, 2013
File:
PDF, 430 KB
english, 2013
Conversion to is in progress
Conversion to is failed