Characterization of Compositional Heterogeneity in...

Macromolecules 2007 / 03 Vol. 40; Iss. 5

Characterization of Compositional Heterogeneity in Chemically Amplified Photoresist Polymer Thin Films with Infrared Spectroscopy

Kang, Shuhui, Vogt, Bryan D., Wu, Wen-li, Prabhu, Vivek M., VanderHart, David L., Rao, Ashwin, Lin, Eric K., Turnquest, Karen
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Volume:
40
Language:
english
Journal:
Macromolecules
DOI:
10.1021/ma062579c
Date:
March, 2007
File:
PDF, 126 KB
english, 2007
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