Fabrication of 10 nm-Scale Complex 3D Nanopatterns with...

ACS Nano 2014 / 02 Vol. 8; Iss. 2

Fabrication of 10 nm-Scale Complex 3D Nanopatterns with Multiple Shapes and Components by Secondary Sputtering Phenomenon

Jeon, Hwan-Jin, Jeong, Hyeon Su, Kim, Yun Ho, Jung, Woo-Bin, Kim, Jeong Yeon, Jung, Hee-Tae
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Volume:
8
Language:
english
Journal:
ACS Nano
DOI:
10.1021/nn4037688
Date:
February, 2014
File:
PDF, 1.59 MB
english, 2014
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