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Self-excitation of the plasma series resonance in radio-frequency discharges: An analytical description
Czarnetzki, U., Mussenbrock, T., Brinkmann, R. P.Volume:
13
Year:
2006
Language:
english
Journal:
Physics of Plasmas
DOI:
10.1063/1.2397043
File:
PDF, 610 KB
english, 2006