Improved cost-effective fabrication of arbitrarily shaped μIPMC transducers
Feng, Guo-Hua, Chen, Ri-HongVolume:
18
Language:
english
Journal:
Journal of Micromechanics and Microengineering
DOI:
10.1088/0960-1317/18/1/015016
Date:
January, 2008
File:
PDF, 1023 KB
english, 2008