[IEEE 17th IEEE International Conference on Micro Electro Mechanical Systems. Maastricht MEMS 2004 Technical Digest - Maastricht, Netherlands (25-29 Jan. 2004)] 17th IEEE International Conference on Micro Electro Mechanical Systems. Maastricht MEMS 2004 Technical Digest - Integration of the DRIE, MUMPs, and bulk micromachining for superior micro-optical systems
Mingching Wu,, Chun-Feng Lai,, Weileun Fang,Year:
2004
Language:
english
DOI:
10.1109/mems.2004.1290531
File:
PDF, 312 KB
english, 2004