Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures
2011 Vol. 29; Iss. 6
Quality factor enhancement on nanomechanical resonators utilizing stiction phenomena
Ashiba, Hiroki, Kometani, Reo, Warisawa, Shin’ichi, Ishihara, SunaoVolume:
29
Year:
2011
Language:
english
DOI:
10.1116/1.3660384
File:
PDF, 1.58 MB
english, 2011