![](/img/cover-not-exists.png)
Time resolved tunable diode laser absoption spectroscopy of dual High Power Impulse Magnetron Sputtering discharges
Do, Hoang Tung, Stranak, Vitezslav, Hippler, RainerVolume:
32
Language:
english
Journal:
International Journal of Modern Physics: Conference Series
DOI:
10.1142/s2010194514603378
Date:
January, 2014
File:
PDF, 898 KB
english, 2014