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Thermal characterization of micro heater arrays on a polyimide film substrate for fingerprint sensing applications
Han, Ji-song, Tan, Zhi-yong, Sato, K, Shikida, MVolume:
15
Language:
english
Journal:
Journal of Micromechanics and Microengineering
DOI:
10.1088/0960-1317/15/2/006
Date:
February, 2005
File:
PDF, 649 KB
english, 2005