Preparation and characterization of high-transmittance AZO...

Applied Surface Science 2014 / 10 Vol. 317

Preparation and characterization of high-transmittance AZO films using RF magnetron sputtering at room temperature

Chen, Jian, Sun, Yihua, Lv, Xin, Li, Derong, Fang, Liang, Wang, Hailin, Sun, Xiaohua, Huang, Caihua, Yu, Haizhou, Feng, Ping
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Volume:
317
Language:
english
Journal:
Applied Surface Science
DOI:
10.1016/j.apsusc.2014.08.051
Date:
October, 2014
File:
PDF, 1.18 MB
english, 2014
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