Preparation of PLZT Ferroelectric Films by RF Sputtering on 200 mmφ Substrate
Kikuchi, S., Miyaguchi, Y., Jimbo, T., Kimura, I., Tanimura, M., Suu, K., Ishikawa, M.Volume:
46
Language:
english
Journal:
Integrated Ferroelectrics
DOI:
10.1080/10584580215379
Date:
January, 2002
File:
PDF, 326 KB
english, 2002