A stiffness model for control and analysis of a MEMS...

Mechanism and Machine Theory 2014 / 10 Vol. 80

A stiffness model for control and analysis of a MEMS hexapod nanopositioner

Shi, Hongliang, Su, Hai-Jun, Dagalakis, Nicholas
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Volume:
80
Language:
english
Journal:
Mechanism and Machine Theory
DOI:
10.1016/j.mechmachtheory.2014.05.004
Date:
October, 2014
File:
PDF, 1.44 MB
english, 2014
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