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Characterization of Amorphous Hydrogenated Carbon Formed by Low-Pressure Inductively Coupled Plasma Enhanced Chemical Vapor Deposition Using Multiple Low-Inductance Antenna Units
Tsuda, Osamu, Ishihara, Masatou, Koga, Yoshinori, Fujiwara, Shuzo, Setsuhara, Yuichi, Sato, NaoyukiVolume:
109
Language:
english
Journal:
The Journal of Physical Chemistry B
DOI:
10.1021/jp045412z
Date:
March, 2005
File:
PDF, 414 KB
english, 2005