A Seismic-Grade Resonant MEMS Accelerometer
Zou, Xudong, Thiruvenkatanathan, Pradyumna, Seshia, Ashwin A.Volume:
23
Language:
english
Journal:
Journal of Microelectromechanical Systems
DOI:
10.1109/jmems.2014.2319196
Date:
August, 2014
File:
PDF, 728 KB
english, 2014