A Seismic-Grade Resonant MEMS Accelerometer

A Seismic-Grade Resonant MEMS Accelerometer

Zou, Xudong, Thiruvenkatanathan, Pradyumna, Seshia, Ashwin A.
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Volume:
23
Language:
english
Journal:
Journal of Microelectromechanical Systems
DOI:
10.1109/jmems.2014.2319196
Date:
August, 2014
File:
PDF, 728 KB
english, 2014
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