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Vapor Pressures of the Copper and Yttrium β-Diketonate MOCVD Precursors
Colominas, Carles, Lau, Kai H., Hildenbrand, Donald L., Crouch-Baker, Steven, Sanjurjo, AngelVolume:
46
Language:
english
Journal:
Journal of Chemical & Engineering Data
DOI:
10.1021/je0003445
Date:
March, 2001
File:
PDF, 67 KB
english, 2001