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New method for studying the pyrolysis of VPE/CVD precursors under vacuum conditions. Application to trimethylantimony and tetramethyltin
Svoboda, Glenn D., Gleaves, John T., Mills, Patrick L.Volume:
31
Language:
english
Journal:
Industrial & Engineering Chemistry Research
DOI:
10.1021/ie00001a004
Date:
January, 1992
File:
PDF, 1.90 MB
english, 1992