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Effects of substrate temperature and near-substrate plasma density on the properties of dc magnetron sputtered aluminum doped zinc oxide
Schmidt, Nathan W., Totushek, Thomas S., Kimes, William A., Callender, David R., Doyle, James R.Volume:
94
Year:
2003
Language:
english
DOI:
10.1063/1.1615694
File:
PDF, 259 KB
english, 2003