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Design and fabrication of a high-sensitive capacitive biaxial microaccelerometer
Liu, Yu, Wen, Zhiyu, Wen, Zhongquan, Zhang, Liuqiang, Yang, HongyunVolume:
17
Language:
english
Journal:
Journal of Micromechanics and Microengineering
DOI:
10.1088/0960-1317/17/1/005
Date:
January, 2007
File:
PDF, 758 KB
english, 2007