Atomic Layer Deposition of Ruthenium on a Titanium Nitride...

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The Journal of Physical Chemistry C 2013 / 09

Atomic Layer Deposition of Ruthenium on a Titanium Nitride Surface: A Density Functional Theory Study

Phung, Quan Manh, Vancoillie, Steven, Pourtois, Geoffrey, Swerts, Johan, Pierloot, Kristine, Delabie, Annelies
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Language:
english
Journal:
The Journal of Physical Chemistry C
DOI:
10.1021/jp405489w
Date:
September, 2013
File:
PDF, 3.94 MB
english, 2013
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