Precise extension-mode resonant sensor with uniform and repeatable sensitivity for detection of ppm-level ammonia
Yu, Feng, Yu, Haitao, Xu, Pengcheng, Li, XinxinVolume:
24
Language:
english
Journal:
Journal of Micromechanics and Microengineering
DOI:
10.1088/0960-1317/24/4/045005
Date:
April, 2014
File:
PDF, 1.31 MB
english, 2014