Inverse-feedforward and robust-feedback control for...

International Journal of Control 2013 / 02 Vol. 86; Iss. 2

Inverse-feedforward and robust-feedback control for high-speed operation on piezo-stages

Ko, Po-Jen, Wang, Yen-Po, Tien, Szu-Chi
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Volume:
86
Language:
english
Journal:
International Journal of Control
DOI:
10.1080/00207179.2012.721568
Date:
February, 2013
File:
PDF, 1.28 MB
english, 2013
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