Optimal Feed-Forward Control for Multizone Baking in Microlithography
Ho, Weng Khuen, Tay, Arthur, Chen, Ming, Kiew, Choon MengVolume:
46
Language:
english
Journal:
Industrial & Engineering Chemistry Research
DOI:
10.1021/ie061011p
Date:
May, 2007
File:
PDF, 359 KB
english, 2007