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Effect of Bias Applied to Hot Wires on Generation of Positive and Negative Charges during Silicon Hot-Wire Chemical Vapor Deposition
Park, Soon Young, Yang, Seung Min, Kim, Chan Soo, Hwang, Nong MoonVolume:
113
Language:
english
Journal:
The Journal of Physical Chemistry C
DOI:
10.1021/jp906196b
Date:
October, 2009
File:
PDF, 1.55 MB
english, 2009