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Ammonia-induced pyrolytic conversion of a vinylic polysilane to silicon nitride
Schmidt, Wayde R., Marchetti, Paul S., Interrante, Leonard V., Hurley, William J., Lewis, Russell H., Doremus, Robert H., Maciel, Gary E.Volume:
4
Language:
english
Journal:
Chemistry of Materials
DOI:
10.1021/cm00022a034
Date:
July, 1992
File:
PDF, 1.81 MB
english, 1992