Metal-Catalyzed Electroless Etching of Silicon in Aerated...

Nano Letters 2014 / 08 Vol. 14; Iss. 8

Metal-Catalyzed Electroless Etching of Silicon in Aerated HF/H 2 O Vapor for Facile Fabrication of Silicon Nanostructures

Hu, Ya, Peng, Kui-Qing, Qiao, Zhen, Huang, Xing, Zhang, Fu-Qiang, Sun, Rui-Nan, Meng, Xiang-Min, Lee, Shuit-Tong
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Volume:
14
Language:
english
Journal:
Nano Letters
DOI:
10.1021/nl500361u
Date:
August, 2014
File:
PDF, 9.92 MB
english, 2014
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