Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures
2011 Vol. 29; Iss. 6
Nanofabrication down to 10 nm on a plastic substrate
Tao, Li, Lee, Jongho, Akinwande, DejiVolume:
29
Year:
2011
Language:
english
DOI:
10.1116/1.3662081
File:
PDF, 1.35 MB
english, 2011