Synthesis and Properties of Diazopiperidiones for Use in...

Chemistry of Materials 2004 / 05 Vol. 16; Iss. 9

Synthesis and Properties of Diazopiperidiones for Use in Nonchemically Amplified Deep UV Photoresists

Tattersall, Peter I., Breslin, David, Grayson, Scott M., Heath, William H., Lou, Kathleen, McAdams, Christopher L., McKean, Dennis, Rathsack, Benjamen M., Willson, C. Grant
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Volume:
16
Language:
english
Journal:
Chemistry of Materials
DOI:
10.1021/cm034638w
Date:
May, 2004
File:
PDF, 111 KB
english, 2004
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