Deposition of thin films of organic–inorganic hybrid...

Deposition of thin films of organic–inorganic hybrid materials based on aromatic carboxylic acids by atomic layer deposition

Klepper, Karina Barnholt, Nilsen, Ola, Fjellvåg, Helmer
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Volume:
39
Year:
2010
Language:
english
Journal:
Dalton Transactions
DOI:
10.1039/c0dt00817f
File:
PDF, 607 KB
english, 2010
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