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Vinyltrimethylsilane (VTMS) as a Probe of Chemical Reactivity of a TiCN Diffusion Barrier-Covered Silicon Surface
Pirolli, Laurent, Teplyakov, Andrew V.Volume:
110
Language:
english
Journal:
The Journal of Physical Chemistry B
DOI:
10.1021/jp055904r
Date:
March, 2006
File:
PDF, 233 KB
english, 2006