Indium Oxide Atomic Layer Deposition Facilitated by the Synergy between Oxygen and Water
Libera, Joseph A., Hryn, John N., Elam, Jeffrey W.Volume:
23
Language:
english
Journal:
Chemistry of Materials
DOI:
10.1021/cm103637t
Date:
April, 2011
File:
PDF, 4.19 MB
english, 2011