Characteristic comparison of AlGaN/GaN enhancement-mode...

Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures 2012 Vol. 30; Iss. 2

Characteristic comparison of AlGaN/GaN enhancement-mode HEMTs with CHF3 and CF4 surface treatment

Chen, C. H., Yang, C. W., Chiu, H. C., Fu, Jeffrey. S.
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Volume:
30
Year:
2012
Language:
english
DOI:
10.1116/1.3680115
File:
PDF, 1.72 MB
english, 2012
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