Chemical Vapor Deposition of Metal Fluorides Using Sodium...

Chemistry of Materials 1994 / 10 Vol. 6; Iss. 10

Chemical Vapor Deposition of Metal Fluorides Using Sodium and Zirconium Fluoroalkoxides

Samuels, John A., Chiang, Wen-C., Yu, Chung-P., Apen, Elizabeth, Smith, David C., Baxter, David V., Caulton, Kenneth G.
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Volume:
6
Language:
english
Journal:
Chemistry of Materials
DOI:
10.1021/cm00046a021
Date:
October, 1994
File:
PDF, 2.96 MB
english, 1994
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