[IEEE 2014 15th International Conference of Young Specialists on Micro/Nanotechnologies and Electron Devices (EDM) - Novosibirsk, Russia (2014.6.30-2014.7.4)] 2014 15th International Conference of Young Specialists on Micro/Nanotechnologies and Electron Devices (EDM) - Synthesis of conducting films In2O3:Sn with the method of magnetron sputtering and their electrophysical properties
Troyan, Pavel E., Zhidik, Yury S., Sakharov, Yury V.Year:
2014
Language:
english
DOI:
10.1109/edm.2014.6882486
File:
PDF, 322 KB
english, 2014