Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures
2004 Vol. 22; Iss. 4
Study of structural and microstructural properties of AlN films deposited on silicon and quartz substrates for surface acoustic wave devices
Assouar, M. B., Elmazria, O., Elhakiki, M., Alnot, P.Volume:
22
Year:
2004
Language:
english
DOI:
10.1116/1.1767196
File:
PDF, 573 KB
english, 2004