Study of structural and microstructural properties of AlN...

Study of structural and microstructural properties of AlN films deposited on silicon and quartz substrates for surface acoustic wave devices

Assouar, M. B., Elmazria, O., Elhakiki, M., Alnot, P.
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Volume:
22
Year:
2004
Language:
english
DOI:
10.1116/1.1767196
File:
PDF, 573 KB
english, 2004
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