Characteristics of ZnO Thin Films by Means of Plasma-Enhanced Atomic Layer Deposition
Park, Sang-Hee Ko, Hwang, Chi-Sun, Kwack, Ho-Sang, Lee, Jin-Hong, Chu, Hye YongVolume:
9
Year:
2006
Language:
english
Journal:
Electrochemical and Solid-State Letters
DOI:
10.1149/1.2221770
File:
PDF, 251 KB
english, 2006