ECS Transactions [ECS China Semiconductor Technology International Conference 2012 (CSTIC 2012) - Shanghai, China (March 18 - March 19, 2012)] - Low Stress TiN as Metal Hard Mask for Advance Cu-Interconnect
Liechao, Luo, Kang, Jian, Wen, JamesYear:
2012
Language:
english
DOI:
10.1149/1.3694357
File:
PDF, 375 KB
english, 2012