Thermal Stability of Precursors for Atomic Layer Deposition of TiO 2 , ZrO 2 , and HfO 2 : An Ab Initio Study of α-Hydrogen Abstraction in Bis-cyclopentadienyl Dimethyl Complexes
Zydor, Aleksandra, Elliott, Simon D.Volume:
114
Language:
english
Journal:
The Journal of Physical Chemistry A
DOI:
10.1021/jp9072608
Date:
February, 2010
File:
PDF, 1.59 MB
english, 2010