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CMOS Compatible Midinfrared Wavelength-Selective Thermopile for High Temperature Applications
Zhou, Huchuan, Kropelnicki, Piotr, Lee, ChengkuoVolume:
24
Language:
english
Journal:
Journal of Microelectromechanical Systems
DOI:
10.1109/jmems.2014.2322675
Date:
February, 2015
File:
PDF, 1.99 MB
english, 2015