Low temperature processing of indium-tin-zinc oxide channel...

Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures 2011 Vol. 29; Iss. 2

Low temperature processing of indium-tin-zinc oxide channel layers in fabricating thin-film transistors

Lee, Ki Chang, Jo, Kwang-Min, Sung, Sang-Yun, Lee, Joon-Hyung, Kim, Jeong-Joo, Jeong, Byoung-Seong, Pearton, S. J., Norton, D. P., Heo, Young-Woo
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Volume:
29
Year:
2011
Language:
english
DOI:
10.1116/1.3553205
File:
PDF, 456 KB
english, 2011
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